Three-way valve for flow rate control and temperature control device

ABSTRACT

Provided are a three-way valve for flow rate control and a temperature control device, which have improved sealing performance at a sealed portion at which a valve body is rotatably sealed against a fluid having a low temperature of about −85° C. as compared to a case without sealing means for sealing an end portion of the valve body on a side closer to drive means so that the end portion is rotatable with respect to a valve main body, the sealing means having a substantially U-shaped cross section and being made of a synthetic resin, and being urged in an opening direction by a spring member made of a metal. The three-way valve for flow rate control includes: a valve body having a cylindrical shape and having an opening, which is arranged in a freely rotatable manner in a valve seat of a valve main body, and simultaneously switches a first valve port from a closed state to an opened state and switches a second valve port from an opened state to a closed state; drive means for driving the valve body to rotate; and sealing means for sealing an end portion of the valve body on a side closer to the drive means so that the end portion is rotatable with respect to the valve main body, the sealing means having a substantially U-shaped cross section and being made of a synthetic resin, and being urged in an opening direction by a spring member made of a metal.

TECHNICAL FIELD

The present invention relates to a three-way valve for flow rate controland a temperature control device.

BACKGROUND ART

Hitherto, as a technology relating to a three-way valve for flow ratecontrol, the applicant of the present invention has already proposed athree-way valve for flow rate control disclosed in, for example, PatentLiterature 1.

The three-way valve for flow rate control disclosed in Patent Literature1 includes: a valve main body including a valve seat having a columnarspace and having a first valve port and a second valve port, the firstvalve port having a rectangular cross section and allowing inflow of afirst fluid, the second valve port having a rectangular cross sectionand allowing inflow of a second fluid; a valve body having ahalf-cylindrical shape with a predetermined central angle and having acurved-surface shape at each of both end surfaces of the valve body in acircumferential direction, which is arranged in a freely rotatablemanner in the valve seat of the valve main body, and simultaneouslyswitches the first valve port from a closed state to an opened state andswitches the second valve port from an opened state to a closed state;and drive means for driving the valve body to rotate.

CITATION LIST Patent Literature

[PTL 1] JP 6104443 B1

SUMMARY OF INVENTION Technical Problem

The present invention has an object to provide a three-way valve forflow rate control and a temperature control device, which have improvedsealing performance at a sealed portion at which a valve body isrotatably sealed against a fluid having a low temperature of about −85°C. as compared to a case without sealing means for sealing an endportion of the valve body on a side closer to drive means so that theend portion is rotatable with respect to a valve main body, the sealingmeans having a substantially U-shaped cross section and being made of asynthetic resin, and being urged in an opening direction by a springmember made of a metal.

Solution to Problem

According to the invention of claim 1, provided is a three-way valve forflow rate control, including: a valve main body including a valve seathaving a columnar space and having a first valve port, a second valveport, and first and second valve ports, the first valve port having arectangular cross section and allowing outflow of a fluid, the secondvalve port having a rectangular cross section and allowing outflow ofthe fluid, the first and second outflow ports being configured to allowan outside and the first and second valve ports to communicate with eachother, respectively; a valve body having a cylindrical shape and havingan opening, which is arranged in a freely rotatable manner in the valveseat of the valve main body, and simultaneously switches the first valveport from a closed state to an opened state and switches the secondvalve port from an opened state to a closed state; drive means fordriving the valve body to rotate; and sealing means for sealing an endportion of the valve body on a side closer to the drive means so thatthe end portion is rotatable with respect to the valve main body, thesealing means having a substantially U-shaped cross section and beingmade of a synthetic resin, and being urged in an opening direction by aspring member made of a metal.

According to the invention of claim 2, provided is a three-way valve forflow rate control, including: a valve main body including a valve seathaving a columnar space and having a first valve port, a second valveport, and first and second inflow ports, the first valve port having arectangular cross section and allowing inflow of a first fluid, thesecond valve port having a rectangular cross section and allowing inflowof a second fluid, the first and second inflow ports being configured toallow an outside and the first and second valve ports to communicatewith each other, respectively; a valve body having a cylindrical shapeand having an opening, which is arranged in a freely rotatable manner inthe valve seat of the valve main body, and simultaneously switches thefirst valve port from a closed state to an opened state and switches thesecond valve port from an opened state to a closed state; drive meansfor driving the valve body to rotate; and sealing means for sealing anend portion of the valve body on a side closer to the drive means sothat the end portion is rotatable with respect to the valve main body,the sealing means having a substantially U-shaped cross section andbeing made of a synthetic resin, and being urged in an opening directionby a spring member made of a metal.

According to the invention of claim 3, in the three-way valve for flowrate control according to claim 1 or 2, the sealing means includes anomniseal.

According to the invention of claim 4, in the three-way valve for flowrate control according to claim 1 or 2, the sealing means includes aplurality of sealing means arranged in an axial direction around the endportion of the valve body on the side closer to the drive means.

According to the invention of claim 5, in the three-way valve for flowrate control according to claim 4, a bearing member configured torotatably support the end portion of the valve body on the side closerto the drive means is arranged between the plurality of sealing means.

According to the invention of claim 6, in the three-way valve for flowrate control according to claim 4, the bearing member is arranged so asto be in close contact with the plurality of sealing means.

According to the invention of claim 7, provided is a temperature controldevice, including: temperature control means having a flow passage fortemperature control, which allows a fluid for temperature control toflow therethrough, the fluid for temperature control including a lowertemperature fluid and a higher temperature fluid adjusted in mixtureratio; first supply means for supplying the lower temperature fluidadjusted to a first predetermined lower temperature; second supply meansfor supplying the higher temperature fluid adjusted to a secondpredetermined higher temperature; mixing means, which is connected tothe first supply means and the second supply means, for mixing the lowertemperature fluid supplied from the first supply means and the highertemperature fluid supplied from the second supply means and supplying amixture of the lower temperature fluid and the higher temperature fluidto the flow passage for temperature control; and a flow rate controlvalve configured to divide the fluid for temperature control havingflowed through the flow passage for temperature control between thefirst supply means and the second supply means while controlling a flowrate of the fluid for temperature control, wherein the three-way valvefor flow rate control of any one of claims 1, 3 to 6 is used as the flowrate control valve.

According to the invention of claim 8, provided is a temperature controldevice, including: temperature control means having a flow passage fortemperature control, which allows a fluid for temperature control toflow therethrough, the fluid for temperature control including a lowertemperature fluid and a higher temperature fluid adjusted in mixtureratio; first supply means for supplying the lower temperature fluidadjusted to a first predetermined lower temperature; second supply meansfor supplying the higher temperature fluid adjusted to a secondpredetermined higher temperature; a flow rate control valve, which isconnected to the first supply means and the second supply means, forflowing, to the flow passage for temperature control, the lowertemperature fluid supplied from the first supply means and the highertemperature fluid supplied from the second supply means while adjustingthe mixture ratio thereof, wherein the three-way valve for flow ratecontrol of any one of claims 2 to 6 is used as the flow rate controlvalve.

Advantageous Effects of Invention

According to the present invention, there can be provided the three-wayvalve for flow rate control and the temperature control device, whichhave improved sealing performance at the sealed portion at which thevalve body is rotatably sealed against the fluid having a lowtemperature of about −85° C. as compared to the case without sealingmeans for sealing the end portion of the valve body on the side closerto drive means so that the end portion is rotatable with respect to thevalve main body, the sealing means having a substantially U-shaped crosssection and being made of a synthetic resin, and being urged in theopening direction by the spring member made of a metal.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1(a) is a front view for illustrating a three-way motor valve asone example of a three-way valve for flow rate control according to afirst embodiment of the present invention.

FIG. 1(b) is a right side view for illustrating the three-way motorvalve as one example of the three-way valve for flow rate controlaccording to the first embodiment of the present invention.

FIG. 1(c) is a bottom view for illustrating an actuator portion of thethree-way motor valve as one example of the three-way valve for flowrate control according to the first embodiment of the present invention.

FIG. 2 is a sectional view taken along the line A-A of FIG. 1(b), forillustrating the three-way motor valve as one example of the three-wayvalve for flow rate control according to the first embodiment of thepresent invention.

FIG. 3 is a sectional view taken along the line B-B of FIG. 1(a), forillustrating the three-way motor valve as one example of the three-wayvalve for flow rate control according to the first embodiment of thepresent invention.

FIG. 4 is a sectional perspective view for illustrating main parts ofthe three-way motor valve as one example of the three-way valve for flowrate control according to the first embodiment of the present invention.

FIG. 5(a) is a perspective configuration view for illustrating a valveseat element.

FIG. 5(b) is a plan configuration view for illustrating the valve seatelement.

FIG. 6 is a configuration view for illustrating a relationship betweenthe valve seat element and a valve shaft.

FIG. 7(a) is a perspective configuration view for illustrating a wavewasher.

FIG. 7(b) is a front view for illustrating the wave washer.

FIG. 7 (c) is a partially cutaway side view for illustrating the wavewasher.

FIG. 8 is a perspective configuration view for illustrating an adjustingring.

FIG. 9(a) is a perspective configuration view for illustrating a valveshaft.

FIG. 9(b) is a front configuration view for illustrating the valveshaft.

FIG. 10(a) is a configuration view of a state in which one of valveports is completely opened, for illustrating an operation of the valveshaft.

FIG. 10(b) is a configuration view of a state in which both of the valveports are partially opened, for illustrating the operation of the valveshaft.

FIG. 11(a) is a partially cutaway perspective configuration view forillustrating an omniseal.

FIG. 11(b) is a sectional configuration view for illustrating theomniseal.

FIG. 12 is a sectional view for illustrating a state in which theomniseal is fitted.

FIG. 13 is a configuration view for illustrating a modification exampleof the omniseal.

FIG. 14(a) is a configuration view for illustrating the operation of thevalve shaft.

FIG. 14(b) is a configuration view for illustrating the operation of thevalve shaft.

FIG. 15 is a sectional configuration view for illustrating an operationof the three-way motor valve as one example of the three-way valve forflow rate control according to the first embodiment of the presentinvention.

FIG. 16 is a sectional configuration view for illustrating a three-waymotor valve as one example of the three-way valve for flow rate controlaccording to a second embodiment of the present invention.

FIG. 17 is a sectional configuration view for illustrating a three-waymotor valve as one example of the three-way valve for flow rate controlaccording to a thirteenth embodiment of the present invention.

FIG. 18 is a schematic diagram for illustrating a constant-temperaturemaintaining device (chiller device) to which the three-way motor valveas one example of the three-way valve for flow rate control according tothe first embodiment of the present invention is applied.

FIG. 19 is a schematic diagram for illustrating a constant-temperaturemaintaining device (chiller device) to which the three-way motor valveas one example of the three-way valve for flow rate control according tothe second embodiment of the present invention is applied.

DESCRIPTION OF EMBODIMENTS

In the following, embodiments of the present invention are describedwith reference to the drawings.

First Embodiment

FIG. 1(a) is a front view for illustrating a three-way motor valve asone example of a three-way valve for flow rate control according to afirst embodiment of the present invention. FIG. 1(b) is a left side viewfor illustrating the three-way motor valve. FIG. 1(c) is a bottom viewfor illustrating the three-way motor valve. FIG. 2 is a sectional viewtaken along the line A-A of FIG. 1(b). FIG. 3 is a sectional view takenalong the line B-B of FIG. 1(a). FIG. 4 is a sectional perspective viewfor illustrating main parts of the three-way motor valve.

A three-way motor valve 1 is constructed as a rotary three-way valve. Asillustrated in FIGS. 1 , the three-way motor valve 1 mainly includes avalve portion 2 arranged at a lower portion thereof, an actuator portion3 arranged at an upper portion thereof, and a sealing portion 4 and acoupling portion 5, which are arranged between the valve portion 2 andthe actuator portion 3.

As illustrated in FIG. 2 to FIG. 4 , the valve portion 2 includes avalve main body 6 obtained by forming metal, for example, SUS, into asubstantially rectangular parallelepiped shape. As illustrated in FIG. 3, a first outflow port 7 and a first valve port 9 are formed in one sidesurface (left side surface in the illustrated example) of the valve mainbody 6. The first outflow port 7 allows outflow of a fluid. The firstvalve port 9 as one example of a communication port has a rectangularcross section, and communicates with a valve seat 8 having a columnarspace.

In the first embodiment of the present invention, instead of directlyforming the first outflow port 7 and the first valve port 9 in the valvemain body 6, a first valve seat element 70 as one example of a firstvalve port forming member forming the first valve port 9, and a firstflow passage forming member 15 forming the first outflow port 7 arefitted to the valve main body 6, thereby providing the first outflowport 7 and the first valve port 9.

As illustrated in FIGS. 5 , the first valve seat element 70 integrallyincludes a cylindrical portion 71 and a tapered portion 72. Thecylindrical portion 71 has a cylindrical shape and is provided on anouter side of the valve main body 6. The tapered portion 72 has atapered shape so that an outer diameter of a distal end thereofdecreases toward an inner side of the valve main body 6. The first valveport 9 is formed in the tapered portion 72 of the first valve seatelement 70, and has a rectangular prism shape having a rectangular crosssection (square cross section in the first embodiment of the presentinvention). Further, as described later, one end portion of the firstflow passage forming member 15 forming the first outflow port 7 isinserted under a hermetically sealed (sealed) state into the cylindricalportion 71 of the first valve seat element 70.

As a material for the first valve seat element 70, for example, apolyimide (PI) resin is used. Further, as a material for the first valveseat element 70, for example, so-called “super engineering plastic” canbe used. The super engineering plastic has higher heat resistance andhigher mechanical strength under a high temperature than ordinaryengineering plastic. Examples of the super engineering plastic include,for example, polyether ether ketone (PEEK), polyphenylene sulfide (PPS),polyether sulfone (PES), polyamide imide (PAI), a liquid crystal polymer(LCP), polytetrafluoroethylene (PTFE), polychlorotrifluoroethylene(PCTFE), polyvinylidene fluoride (PVDF), or composite materials thereof.Further, as the material for the first valve seat element 70, there canbe used, for example, “TECAPEEK” (trademark) manufactured by EnsingerJapan Co., Ltd. serving as a PEEK resin material for cutting work, and“TECAPEEK TF 10 blue” (product name) having blending therein 10% PTFE,which is excellent in sliding property, can also be used.

As illustrated in FIG. 3 , a recess 75 is formed in the valve main body6 by, for example, machining. The recess 75 has a shape corresponding toan outer shape of the first valve seat element 70 and similar to theshape of the valve seat element 70. The recess 75 includes a cylindricalportion 75 a corresponding to the cylindrical portion 71 of the firstvalve seat element 70 and a tapered portion 75 b corresponding to thetapered portion 72. A length of the cylindrical portion 75 a of thevalve main body 6 is set larger than a length of the cylindrical portion71 of the first valve seat element 70. As described later, thecylindrical portion 75 a of the valve main body 6 forms a part of afirst pressure applying portion 94. The first valve seat element 70 isfitted to the recess 75 of the valve main body 6 so as to be movable ina direction of moving close to and away from a valve shaft 34 serving asa valve body.

Under a state in which the first valve seat element 70 is fitted to therecess 75 of the valve main body 6, a slight gap is defined between anouter peripheral surface of the first valve seat element 70 and an innerperipheral surface of the recess 75 of the valve main body 6. A fluidhaving flowed into the valve seat 8 may leak and flow into a regionaround an outer periphery of the first valve seat element 70 through theslight gap. Further, the fluid having leaked into the region around theouter periphery of the first valve seat element 70 is led into the firstpressure applying portion 94 being a space defined on an outer side ofthe cylindrical portion 71 of the first valve seat element 70. The firstpressure applying portion 94 is configured to apply a pressure of thefluid to a surface 70 a of the first valve seat element 70 opposite tothe valve shaft 34. As described later, the fluid flowing into the valveseat 8 is a fluid flowing out through a second valve port 18 as well asa fluid flowing out through the first valve port 9. The first pressureapplying portion 94 is partitioned under a state in which the first flowpassage forming member 15 hermetically seals the first pressure applyingportion 94 with respect to the first outflow port 7.

The pressure of the fluid, which is to be applied to the valve shaft 34arranged inside the valve seat 8, depends on a flow rate of the fluiddetermined by an opening/closing degree of the valve shaft 34. The fluidflowing into the valve seat 8 also flows (leaks) through the first valveport 9 and the second valve port 18 into a slight gap defined betweenthe valve seat 8 and an outer peripheral surface of the valve shaft 34.Therefore, into the first pressure applying portion 94 adapted for thefirst valve seat element 70, not only the fluid flowing out through thefirst valve port 9 flows (leaks), but also the fluid flowing into theslight gap defined between the valve seat 8 and the outer peripheralsurface of the valve shaft 34 and flowing out through the second valveport 18 flows (leaks).

As illustrated in FIG. 5(b), a concave portion 74 is formed at a distalend of the tapered portion 72 of the first valve seat element 70. Theconcave portion 74 is one example of a gap reducing portion having anarc shape in plan view, which forms part of a curved surface of acolumnar shape corresponding to the valve seat 8 having a columnar shapein the valve main body 6. A curvature radius R of the concave portion 74is set to a value substantially equal to a curvature radius of the valveseat 8 or a curvature radius of the valve shaft 34. In order to preventbiting of the valve shaft 34 to be rotated inside the valve seat 8, thevalve seat 8 of the valve main body 6 defines a slight gap with respectto the outer peripheral surface of the valve shaft 34. As illustrated inFIG. 6 , the concave portion 74 of the first valve seat element 70 isfitted so as to protrude toward the valve shaft 34 side more than thevalve seat 8 of the valve main body 6 or so as to be brought intocontact with the outer peripheral surface of the valve shaft 34 under astate in which the first valve seat element 70 is fitted to the valvemain body 6. As a result, a gap G between the valve shaft 34 and aninner surface of the valve seat 8 of the valve main body 6 being amember opposed to the valve shaft 34 partially becomes a value reducedby the protruding amount of the concave portion 74 of the first valveseat element 70 as compared to that of a gap between the valve shaft 34and another portion of the valve seat 8. Thus, a gap G1 between theconcave portion 74 of the first valve seat element 70 and the valveshaft 34 is set to a desired value (G1<G2) smaller than (or a gapnarrower than) a gap G2 between the valve shaft 34 and the inner surfaceof the valve seat 8. The gap G1 between the concave portion 74 of thefirst valve seat element 70 and the valve shaft 34 may correspond to astate in which the concave portion 74 of the valve seat element 70 isbrought into contact with the valve shaft 34, that is, a state in whichno gap is defined (the gap G1=0).

However, in a case in which the concave portion 74 of the first valveseat element 70 is brought into contact with the valve shaft 34, thereis a fear in that driving torque of the valve shaft 34 is increased dueto contact resistance of the concave portion 74 when the valve shaft 34is driven to rotate. Accordingly, a contact degree of the concaveportion 74 of the first valve seat element 70 with the valve shaft 34 isadjusted in consideration of rotational torque of the valve shaft 34.That is, the contact degree is adjusted to such an extent as to involveno increase in the driving torque of the valve shaft 34 or involveslight increase even when the driving torque is increased, and cause notrouble for rotation of the valve shaft 34.

As illustrated in FIG. 3 and FIG. 4 , the first flow passage formingmember 15 is made of a metal such as SUS or a synthetic resin such as apolyimide (PI) resin and has a cylindrical shape. The first flow passageforming member 15 has the first outflow port 7 formed therein tocommunicate with the first valve port 9 irrespective of shift of aposition of the first valve seat element 70. About one-half of the firstflow passage forming member 15 on the first valve seat element 70 sideis formed as a small-thickness cylindrical portion 15 a having acylindrical shape with a relatively small thickness. Further, aboutone-half of the first flow passage forming member on a side opposite tothe first valve seat element 70 is formed as a large-thicknesscylindrical portion 15 b having a cylindrical shape with a thicknesslarger than the thickness of the portion having the cylindrical shapewith a small thickness. An inner surface of the first flow passageforming member 15 extends to form a cylindrical shape. A flange portion15 c having an annular shape is formed at an outer periphery of thefirst flow passage forming member 15 so as to be located between thesmall-thickness cylindrical portion 15 a and the large-thicknesscylindrical portion 15 b. The flange portion 15 c has a relatively largethickness so as to extend outward in a radial direction. The flangeportion 15 c is arranged so that its outer peripheral end is in movablecontact with the inner peripheral surface of the recess 75.

A first wave washer (corrugated washer) 16 is provided on the outer sideof the cylindrical portion 71 of the first valve seat element 70 alongan axial direction thereof. The first wave washer 16 is one example ofan elastic member configured to elastically deform the first valve seatelement 70 in the direction of moving close to and away from the valveshaft 34 while allowing displacement of the first valve seat element inthe direction of moving close to and away from the valve shaft 34. Asillustrated in FIGS. 7 , the first wave washer 16 is made of, forexample, stainless steel, iron, or phosphor bronze, and has an annularshape having a desired width when a front side thereof is projected.Further, a side surface of the first wave washer 16 is formed into awavy (corrugated) shape, and the first wave washer 16 is elasticallydeformable in a thickness direction thereof. An elastic modulus of thefirst wave washer 16 is determined by, for example, the thickness, amaterial, or the number of waves of the first wave washer 16. The firstwave washer 16 is received in the first pressure applying portion 94.

Moreover, a first adjusting ring 77 is arranged on an outer side of thefirst wave washer 16. The first adjusting ring 77 is one example of anannular adjusting member configured to adjust the gap G1 between thevalve shaft 34 and the concave portion 74 of the first valve seatelement 70 via the first wave washer 16. As illustrated in FIG. 8 , thefirst adjusting ring 77 is made of a metal such as SUS or a syntheticresin such as a polyimide (PI) resin having heat resistance, and isformed of a cylindrical member having a relatively small length and amale thread 77 a formed in an outer peripheral surface thereof. Recessedgrooves 77 b are formed in an outer end surface of the first adjustingring 77 so as to be 180 degrees opposed to each other. When the firstadjusting ring 77 is fastened and fitted into a female thread portion 78formed in the valve main body 6, a jig (not shown) for adjusting afastening amount is locked to the recessed grooves 77 b so as to turnthe first adjusting ring 77.

As illustrated in FIG. 3 , the first female thread portion 78 forfitting the first adjusting ring 77 is formed in the valve main body 6.A cylindrical portion 79 having a short length is formed at an openingend portion of the valve main body 6, and has an outer diametersubstantially equal to an outer diameter of the first adjusting ring 77.Further, a cylindrical portion 75 d for processing having an innerdiameter larger than that of the first thread portion 78 is formed witha short length between the first female thread portion 78 of the valvemain body 6 and the cylindrical portion 75 c so as to enable processingfor forming the first female thread portion 78 over a required length.

The first adjusting ring 77 is configured to adjust an amount (distance)of pushing and moving the first valve seat element 70 inward by thefirst adjusting ring 77 through adjustment of a fastening amount of thefirst adjusting ring 77 with respect to the female thread portion 78 ofthe valve main body 6. When the fastening amount of the first adjustingring is increased, as illustrated in FIG. 6 , the first valve seatelement 70 is pushed by the first adjusting ring 77 via the first wavewasher 16 and a first pressure-receiving plate 76 so that the concaveportion 74 protrudes from an inner peripheral surface of the valve seat8 and is displaced in a direction of approaching the valve shaft 34.Thus, the gap G1 between the concave portion 74 and the valve shaft 34is reduced. Further, when the fastening amount of the first adjustingring 77 is set to a small amount in advance, the distance of pushing andmoving the first valve seat element 70 by the first adjusting ring 77 isreduced. As a result, the first valve seat element 70 is arranged apartfrom the valve shaft 34, and the gap G1 between the concave portion 74of the first valve seat element 70 and the valve shaft 34 is relativelyincreased. The male thread 77 a of the first adjusting ring 77 and thefemale thread portion 78 of the valve main body 6 are each set to have asmall pitch. With this configuration, a protruding amount of the firstvalve seat element 70 can be finely adjusted.

Further, as illustrated in FIG. 2 , a first flange member 10 as anexample of a connecting member, which is configured to connect a pipe,or the like (not shown), for allowing outflow of the fluid, is mountedto one side surface (left side surface) of the valve main body 6 withfour hexagon socket head cap screws 11. In FIG. 1(b), a reference symbol11 a denotes a screw hole in which the hexagon socket head cap screw 11is fastened. Similarly to the valve main body 6, the first flange member10 is made of metal, for example, SUS. The first flange member 10includes a flange portion 12, an insertion portion 13, and a pipeconnecting portion 14. The flange portion 12 has a side surface havingsubstantially the same rectangular shape as the side surface of thevalve main body 6. The insertion portion 13 has a cylindrical shape witha short length and protrudes from an inner surface of the flange portion12. The pipe connecting portion 14 has a substantially cylindrical shapehaving a large thickness and protrudes from an outer surface of theflange portion 12. A pipe (not shown) is connected to the pipeconnecting portion 14. As illustrated in FIG. 2 , a space between theflange portion 12 of the first flange member 10 and the valve main body6 is hermetically sealed by an O-seal 13 a. A recessed groove 13 bconfigured to receive the O-seal 13 a is formed in an inner peripheralsurface of the flange portion 12 of the first flange member 10. An innerperiphery of the pipe connecting portion 14 is set to, for example, Rc ½being a standard for a tapered female thread having a bore diameter ofabout 21 mm, or a female thread having a diameter of about 0.58 inches.The shape of the pipe connecting portion 14 is not limited to thetapered female thread or the female thread. The pipe connecting portion14 may have, for example, a tube fitting shape that allows a tube to befitted thereto. The pipe connecting portion 14 may have any shape aslong as the pipe connecting portion 14 enables inflow of a fluid throughthe first outflow port 7.

The O-seal 13 a is an O-ring-shaped sealing member including a springmember and an elastically deformable synthetic resin. The spring memberis made of a metal such as stainless steel and is formed in a helicalshape with a circular or elliptical cross section. An outer periphery ofthe spring member is completely covered with the elastically deformablesynthetic resin made of, for example, FEP (copolymer oftetrafluoroethylene and hexafluoropropylene) or PFA (copolymer oftetrafluoroethylene and perfluoroalkoxy ethylene). The O-seal 13 a canmaintain its hermetic sealing performance at a temperature within anultralow temperature range.

As illustrated in FIG. 2 , a second outflow port 17 and the second valveport 18 are formed in another side surface (right side surface in FIG. 2) of the valve main body 6. The second outflow port 17 allows outflow ofa fluid. The second valve port 18 as one example of a communication porthas a rectangular cross section, and communicates with the valve seat 8having the columnar space.

In the first embodiment of the present invention, instead of directlyforming the second outflow port 17 and the second valve port 18 in thevalve main body 6, a second valve seat element 80 as one example of avalve port forming member forming the second valve port 18, and a secondflow passage forming member 25 forming the second outflow port 17 arefitted to the valve main body 6, thereby providing the second outflowport 17 and the second valve port 18.

The second valve seat element 80 has a configuration similar to theconfiguration of the first valve seat element 70 as illustrated in FIG.5 with the reference symbol of the second valve seat element 80 put inparentheses. Specifically, the second valve seat element 80 integrallyincludes a cylindrical portion 81 and a tapered portion 82. Thecylindrical portion 81 has a cylindrical shape and is arranged on theouter side of the valve main body 6. The tapered portion 82 has atapered shape so that its outer diameter decreases toward the inner sideof the valve main body 6. The second valve port 18 is formed in thetapered portion 82 of the second valve seat element 80, and has arectangular prism shape having a rectangular cross section (square crosssection in the first embodiment of the present invention). Further, oneend portion of the second flow passage forming member 25 forming thesecond outflow port 17 is inserted in a hermetically sealed state intothe cylindrical portion 81 of the second valve seat element 80.

As illustrated in FIG. 3 , a recess 85 is formed in the valve main body6 by, for example, machining. The recess 85 has a shape corresponding toan outer shape of the second valve seat element 80 and similar to theshape of the valve seat element 80. The recess 85 includes a cylindricalportion 85 a corresponding to the cylindrical portion 81 of the secondvalve seat element 80 and a tapered portion 85 b corresponding to thetapered portion 82. A length of the cylindrical portion 85 a of thevalve main body 6 is set larger than a length of the cylindrical portion81 of the second valve seat element 80. As described later, thecylindrical portion 85 a of the valve main body 6 forms a secondpressure applying portion 96. The second valve seat element 80 is fittedto the recess 85 of the valve main body 6 so as to be movable in adirection of moving close to and away from the valve shaft 34 serving asa valve body.

Under a state in which the second valve seat element is fitted to therecess 85 of the valve main body 6, a slight gap is defined between thesecond valve seat element 80 and the recess 85 of the valve main body 6.A fluid having flowed into the valve seat 8 can flow into a regionaround an outer periphery of the second valve seat element 80 throughthe slight gap. Further, the fluid having flowed into the region aroundthe outer periphery of the second valve seat element 80 is led into thesecond pressure applying portion 96 being a space defined on an outerside of the cylindrical portion 81 of the second valve seat element 80.The second pressure applying portion 96 is configured to apply apressure of the fluid to a surface 80 a of the second valve seat element80 opposite to the valve shaft 34. The fluid flowing into the valve seat8 is a fluid flowing out through the first valve port 9 as well as afluid flowing out through the second valve port 18. A second pressureapplying portion 98 is partitioned under a state in which the secondflow passage forming member 25 hermetically seals the second pressureapplying portion 98 with respect to the second outflow port 17.

The pressure of the fluid, which is to be applied to the valve shaft 34arranged inside the valve seat 8, depends on a flow rate of the fluiddetermined by an opening/closing degree of the valve shaft 34. The fluidflowing into the valve seat 8 also flows (leaks) through the first valveport 9 and the second valve port 18 into a slight gap defined betweenthe valve seat 8 and an outer peripheral surface of the valve shaft 34.Therefore, into the second pressure applying portion 96 adapted for thesecond valve seat element 80, not only the fluid flowing out through thesecond valve port 18 flows (leaks), but also the fluid flowing into theslight gap defined between the valve seat 8 and the outer peripheralsurface of the valve shaft 34 and flowing out through the first valveport 9 flows. The second valve seat element 80 is made of the samematerial as that of the first valve seat element 70.

As illustrated in FIG. 5(b), a concave portion 84 is formed at a distalend of the tapered portion 82 of the second valve seat element 80. Theconcave portion 84 is one example of a gap reducing portion having anarc shape in plan view, which forms part of a curved surface of acolumnar shape corresponding to the valve seat 8 having a columnar shapein the valve main body 6. A curvature radius R of the concave portion 84is set to a value substantially equal to a curvature radius of the valveseat 8 or a curvature radius of a valve shaft 34. In order to preventbiting of the valve shaft 34 to be rotated inside the valve seat 8, asdescribed later, the valve seat 8 of the valve main body 6 defines aslight gap with respect to an outer peripheral surface of the valveshaft 34. The concave portion 84 of the second valve seat element 80 isfitted so as to protrude toward the valve shaft 34 side more than thevalve seat 8 of the valve main body 6 or so as to be brought intocontact with the outer peripheral surface of the valve shaft 34 under astate in which the second valve seat element 80 is fitted to the valvemain body 6. As a result, a gap G between the valve shaft 34 and aninner surface of the valve seat 8 of the valve main body 6 being amember opposed to the valve shaft 34 is partially set to a value reducedby the protruding amount of the concave portion 84 of the second valveseat element 80 as compared to that of a gap between the valve shaft 34and another portion of the valve seat 8. Thus, a gap G3 between theconcave portion 84 of the second valve seat element 80 and the valveshaft 34 is set to a desired value (G3<G2) smaller than (or a gapnarrower than) the gap G2 between the valve shaft 34 and the innersurface of the valve seat 8. Further, the gap G3 between the concaveportion 84 of the second valve seat element 80 and the valve shaft 34may correspond to a state in which the concave portion 84 of the valveseat element 80 is brought into contact with the valve shaft 34, thatis, a state in which no gap is defined (the gap G3=0).

However, in a case in which the concave portion 84 of the second valveseat element 80 is brought into contact with the valve shaft 34, thereis a fear in that driving torque of the valve shaft 34 is increased dueto contact resistance of the concave portion 84 when the valve shaft 34is driven to rotate. Accordingly, a contact degree of the concaveportion 84 of the second valve seat element 70 with the valve shaft 34is adjusted in consideration of the rotational torque of the valve shaft34. That is, the contact degree is adjusted to such an extent as toinvolve no increase in the driving torque of the valve shaft 34 orinvolve slight increase even when the driving torque is increased, andcause no trouble for rotation of the valve shaft 34.

As illustrated in FIG. 3 and FIG. 4 , the second flow passage formingmember 25 is made of a metal such as SUS or a synthetic resin such as apolyimide (PI) resin and has a cylindrical shape. The second flowpassage forming member 25 has the second outflow port 17 formed thereinto communicate with the second valve port 18 irrespective of shift of aposition of the second valve seat element 80. About one-half of thesecond flow passage forming member 25 on the second valve seat element80 side is formed as a small-thickness cylindrical portion 25 a having acylindrical shape with a relatively small thickness. Further, aboutone-half of the second flow passage forming member 25 on a side oppositeto the second valve seat element 80 is formed as a large-thicknesscylindrical portion 25 b having a cylindrical shape with a thicknesslarger than the thickness of the portion having the cylindrical shapewith a small thickness. An inner surface of the second flow passageforming member 25 extends to form a cylindrical shape. A flange portion25 c having an annular shape is formed at an outer periphery of thesecond flow passage forming member 25 so as to be located between thesmall-thickness cylindrical portion 25 a and the large-thicknesscylindrical portion 25 b. The flange portion 25 c has a relatively largethickness so as to extend outward in the radial direction. The flangeportion 25 c is arranged so that its outer peripheral end is in movablecontact with an inner peripheral surface of the recess 85.

A second wave washer (corrugated washer) 26 is provided on the outerside of the cylindrical portion 81 of the second valve seat element 80.The second wave washer 26 is one example of an elastic member configuredto push and move the second valve seat element 80 in a direction ofcoming into contact with the valve shaft 34 while allowing displacementof the second valve seat element 80 in a direction of moving close toand away from the valve shaft 34. As illustrated in FIGS. 7 , the secondwave washer 26 is made of, for example, stainless steel, iron, orphosphor bronze, and has an annular shape having a desired width when afront side thereof is projected. Further, a side surface of the secondwave washer 26 is formed into a wavy (corrugated) shape, and the secondwave washer 26 is elastically deformable in a thickness directionthereof. An elastic modulus of the second wave washer 26 is determinedby, for example, the thickness, a material, or the number of waves ofthe second wave washer 26. The second wave washer 26 equivalent to thefirst wave washer 16 is used.

Moreover, a second adjusting ring 87 is arranged on an outer side of thesecond wave washer 26. The second adjusting ring 87 is one example of anadjusting member configured to adjust the gap G3 between the valve shaft34 and the concave portion 84 of the second valve seat element 80 viathe second wave washer 26. As illustrated in FIG. 8 , the secondadjusting ring 87 is made of a synthetic resin having heat resistance ormetal, and is formed of a cylindrical member having a relatively smalllength and a male thread 87 a formed in an outer peripheral surfacethereof. Recessed grooves 87 b are formed in an outer end surface of thesecond adjusting ring 87 so as to be 180 degrees opposed to each other.When the second adjusting ring 87 is fastened and fitted into a femalethread portion 88 formed in the valve main body 6, a jig (not shown) foradjusting a fastening amount is locked to the recessed grooves 87 b soas to turn the second adjusting ring 87.

As illustrated in FIG. 3 , the second female thread portion 88 forfitting the second adjusting ring 87 is formed in the valve main body 6.A cylindrical portion 89 having a short length is formed at an openingend portion of the valve main body 6, and has an outer diametersubstantially equal to an outer diameter of the second adjusting ring87. Further, a cylindrical portion 85 d for processing having an innerdiameter larger than that of the second female thread portion 88 isformed with a short length between the second female thread portion 88of the valve main body 6 and the cylindrical portion 85 c so as toenable processing for forming the second female thread portion 88 over arequired length.

The second adjusting ring 87 is configured to adjust an amount(distance) of pushing and moving the second valve seat element 80 inwardby the second adjusting ring 877 via the second wave washer 26 throughadjustment of a fastening amount of the second adjusting ring 87 withrespect to the female thread portion 88 of the valve main body 6. Whenthe fastening amount of the second adjusting ring 87 is increased, asillustrated in FIG. 6 , the second valve seat element 80 is pushed bythe second adjusting ring 87 via the second wave washer 26 so that theconcave portion 84 protrudes from the inner peripheral surface of thevalve seat 8 and is displaced in a direction of approaching the valveshaft 34. Thus, the gap G3 between the concave portion 84 and the valveshaft 34 is reduced. Further, when the fastening amount of the secondadjusting ring 87 is set to a small amount in advance, the distance ofpushing and moving the second valve seat element 80 by the secondadjusting ring 87 is reduced. As a result, the second valve seat element80 is arranged apart from the valve shaft 34, and the gap G3 between theconcave portion 84 of the second valve seat element 80 and the valveshaft 34 is relatively increased. The male thread 87 a of the secondadjusting ring 87 and the female thread portion 88 of the valve mainbody 6 are each set to have a small pitch. With this configuration, aprotruding amount of the second valve seat element 80 can be finelyadjusted.

As illustrated in FIG. 2 , a second flange member 19 as an example of aconnecting member for connecting a pipe (not shown) which allows outflowof the fluid is mounted to the another side surface of the valve mainbody 6 with four hexagon socket head cap screws 20. Similarly to thefirst flange member 10, the second flange member 19 is made of metal,for example, SUS. The second flange member 19 has a flange portion 21,an insertion portion 22, and a pipe connecting portion 23. The flangeportion 21 has a side surface having the same rectangular shape as theside surface of the valve main body 6. The insertion portion 22 has acylindrical shape and protrudes from an inner surface of the flangeportion 21. The pipe connecting portion 23 has a substantiallycylindrical shape having a large thickness and protrudes from an outersurface of the flange portion 21. A pipe (not shown) is connected to thepipe connecting portion 23. As illustrated in FIG. 2 , a space betweenthe flange portion 21 of the second flange member 19 and the valve mainbody 6 is hermetically sealed by an O-seal 21 a. An annular recessedgroove 21 b configured to receive the O-seal 21 a is formed in an innerperipheral surface of the flange portion 21 of the second flange member19. An inner periphery of the pipe connecting portion 23 is set to, forexample, Rc ½ being a standard for a tapered female thread having a borediameter of about 21 mm, or a female thread having a diameter of about0.58 inches. Similarly to the pipe connecting portion 14, the shape ofthe pipe connecting portion 23 is not limited to the tapered femalethread or the female thread. The pipe connecting portion 23 may have,for example, a tube fitting shape that allows a tube to be fittedthereto. The pipe connecting portion 23 may have any shape as long asthe pipe connecting portion 23 enables inflow of a fluid through thesecond outflow port 17. The O-seal 21 a is equivalent to the O-seal 13a.

As the fluid (brine), for example, a fluorine-based inert liquidadaptable at a pressure of from 0 MPa to 1 MPa and within a temperaturerange of from about −85° C. to about 120° C., for example, Opteon(trademark) (manufactured by Chemours-Mitsui Fluoroproducts Co., Ltd.)or Novec (trademark) (manufactured by 3M company) is used.

Further, as illustrated in FIG. 2 , in a lower end surface of the valvemain body 6, an inflow port 26 having a circular cross section as thethird valve port is opened. The inflow port 26 allows inflow of a fluid.A third flange member 27 as an example of a connecting member forconnecting a pipe (not shown) which allows inflow of the fluid ismounted to the lower end surface of the valve main body 6 with fourhexagon socket head cap screws 28. A cylindrical portion 26 a that hasan inner diameter larger than the inflow port 26 so as to allow thethird flange member 27 to be fitted therein is opened in a lower endportion of the inflow port 26. The third flange portion 27 has a flangeportion 29, an insertion portion 30 (see FIG. 2 ), and a pipe connectingportion 31. The flange portion 29 has a bottom surface having arectangular shape. The insertion portion 30 has a cylindrical shape witha short length and protrudes from an inner surface of the flange portion29. The pipe connecting portion 31 has a substantially cylindrical shapehaving a large thickness and protrudes from an outer surface of theflange portion 29. A pipe (not shown) is connected to the pipeconnecting portion 31. A space between the flange portion 29 of thethird flange member 27 and the valve main body 6 is hermetically sealedby an O-seal 29 a. A recessed groove 29 b for receiving the O-seal 29 ais formed in an inner peripheral surface of the flange portion 29 of thethird flange member 27. An inner periphery of the pipe connectingportion 31 is set to, for example, Rc ½ being a standard for a taperedfemale thread having a bore diameter of about 21 mm and a female threadhaving a diameter of about 0.58 inches. The shape of the pipe connectingportion 31 is not limited to the tapered female thread or the femalethread. The pipe connecting portion 31 may have, for example, a tubefitting shape that allows a tube to be fitted thereto. The pipeconnecting portion 31 may have any shape as long as the pipe connectingportion 31 enables inflow of a fluid through the inflow port 26. TheO-seal 29 a is equivalent to the O-seal 13 a.

As illustrated in FIG. 3 , the valve seat 8 is formed in a center of thevalve main body 6. The valve seat 8 forms the first valve port 9 havinga rectangular cross section and the second valve port 18 having arectangular cross section when the first valve seat element 70 and thesecond valve seat element are fitted to the valve main body 6. The valveseat 8 has a space having a columnar shape corresponding to an outershape of a valve body to be described later. Further, part of the valveseat 8 is formed by the first valve seat element 70 and the second valveseat element 80. The valve seat 8 having a columnar shape is provided ina state of penetrating an upper end surface of the valve main body 6. Asillustrated in FIGS. 9 , the first valve port 9 and the second valveport 18 provided to the valve main body 6 are arranged in an axialsymmetrical manner with respect to a center axis (rotation axis) C ofthe valve seat 8 having a columnar shape. More specifically, the firstvalve port 9 and the second valve port 18 are arranged so as to beorthogonal to the valve seat 8 having a columnar shape. One end edge ofthe first valve port 9 is opened in a position opposed to another endedge of the second valve port 18 through the center axis C, that is, ina position different by 180°. Further, another end edge of the firstvalve port 9 is opened in a position opposed to one end edge of thesecond valve port 18 through the center axis C, that is, in a positiondifferent by 180°. In FIGS. 9 , for convenience, illustration of a gapbetween the valve seat 8 and the valve shaft 34 is omitted.

Further, as illustrated in FIG. 2 , the first valve port 9 and thesecond valve port 18 are openings each having a rectangular crosssection such as a square cross section and are formed through fittingthrough fitting of the first valve seat element 70 and the second valveseat element 80 to the valve main body 6 as described above. A length ofone side of the first valve port 9 and the second valve port 18 is setto be smaller than a diameter of the first outflow port 7 and the secondoutflow port 17. The first valve port 9 and the second valve port 18 areformed in a polygonal cylinder shape having a cross section having arectangular shape inscribed in the first outflow port 7 and the secondoutflow port 17.

As illustrated in FIGS. 9 , a valve shaft 34 as one example of the valvebody has an outer shape obtained by forming metal, for example, SUS,into a substantially columnar shape. The valve shaft 34 mainly includesa valve body portion 35, upper and lower shaft support parts 36 and 37,a sealing portion 38, and a coupling portion 39, which are integrallyprovided. The valve body portion 35 functions as a valve body. The upperand lower shaft support parts 36 and 37 are provided above and below thevalve body portion 35, respectively, and support the valve shaft 34 in afreely rotatable manner. The sealing portion 38 is formed of the samepart of the upper shaft support part 36. The coupling portion 39 isprovided to an upper portion of the sealing portion 38.

The upper and lower shaft support parts 36 and 37 each have acylindrical shape having an outer diameter smaller than that of thevalve body portion 35. The upper and lower shaft support parts 36 and 37are set so as to have outer diameters having equal or different values.As illustrated in FIG. 4 , the lower shaft support part 37 is rotatablysupported by a lower end portion of the valve seat 8 provided to thevalve main body 6 through intermediation of a bearing 41 serving as abearing member. A support portion 42 having an annular shape forsupporting the bearing 41 is provided at a lower portion of the valveseat 8. The bearing 41, the support portion 42, and the inflow port 26are set to have a substantially equal inner diameter, and are configuredto allow inflow of the fluid for temperature control to an inside of thevalve body portion 35 with little resistance.

Further, as illustrated in FIG. 2 and FIG. 9(b), the valve body portion35 has a cylindrical shape having an opening 44 formed therein. Theopening 44 has a substantially half-cylindrical shape with an openingheight H2, which is smaller than an opening height H1 of the first andsecond valve ports 9 and 18. A valve operating portion 45 having theopening 44 of the valve body portion 35 has a half-cylindrical shape(substantially half-cylindrical shape of a cylindrical portion excludingthe opening 44) with a predetermined central angle α (for example,180°). The valve operating portion 45 is arranged in a freely rotatablemanner in the valve seat 8 and held with respect to the inner peripheralsurface of the valve seat 8 through a slight gap to preventmetal-to-metal biting. Accordingly, with the valve body portion 35positioned above and below the opening 44 included, the valve operatingportion 45 simultaneously switches the first valve port 9 from a closedstate to an opened state and the second valve port 18 from an openedstate to a closed state in a reverse direction. As illustrated in FIGS.9 , upper and lower valve shaft parts 46 and 47 arranged above and belowthe valve operating portion 45 each have a cylindrical shape having anouter diameter equal to that of the valve operating portion 45, and areheld with respect to the inner peripheral surface of the valve seat 8 ina freely rotatable manner through a slight gap. In an inside over thevalve operating portion 45 and the upper and lower valve shaft parts 46and 47, a space 48 is provided in a state of penetrating the valve shaft34 toward a lower edge thereof. The space 48 has a columnar shape.

Further, a cross section of each of both end surfaces 45 a and 45 b ofthe valve operating portion 45 in a circumferential direction (rotationdirection), which is taken along a direction intersecting (orthogonalto) the center axis C, has a planar shape. More specifically, asillustrated in FIGS. 9 , the cross section of each of the both endportions 45 a and 45 b of the valve operating portion 45 in thecircumferential direction, which is taken along a direction intersectinga rotation axis C, has a planar shape toward the opening 44. A thicknessof each of both end portions 45 a and 45 b is set to, for example, avalue equal to a thickness T of the valve operating portion 45.

The cross section of each of the both end portions 45 a and 45 b of thevalve operating portion 45 in the circumferential direction, which istaken along a direction intersecting the rotation axis C, is not limitedto a planar shape. Each of the both end surfaces 45 a and 45 b in thecircumferential direction (rotation direction) may have a curved-surfaceshape.

As illustrated in FIGS. 10 , when the valve shaft 34 is driven to rotateto open and close the first and second valve ports 9 and 18, in flows ofthe fluid, the both end portions 45 a and 45 b of the valve operatingportion 45 in the circumferential direction are moved (rotated) so as toprotrude from or retreat to the ends of the first and second valve ports9 and 18 in the circumferential direction. Accordingly, the first andsecond valve ports 9 and 18 are switched from the opened state to theclosed state, or from the closed state to the opened state. At thismoment, it is desired that each of the both end portions and 45 b of thevalve operating portion 45 in the circumferential direction have a crosssection having a planar shape so as to linearly change opening areas ofthe first and second valve ports 9 and 18 with respect to a rotationangle of the valve shaft 34.

As illustrated in FIG. 2 , the sealing portion 4 hermetically seals(seals) the valve shaft 34 in a liquid-tight state so that the valveshaft 34 is rotatable with respect to the valve main body 6. The sealingportion 4 includes the valve main body 6, the valve shaft 34, omniseals160 and 170, and a bearing member 180. The omniseals 160 and 170 are oneexample of sealing means and are arranged between the valve main body 6and the valve shaft 34 so as to seal a space therebetween in aliquid-tight state. The omniseals 160 and 170 each have a substantiallyU-shaped cross section and are made of a synthetic resin, and are eachurged in an opening direction by a spring member made of metal. Thebearing member 180 supports the valve shaft 34 so that the valve shaft34 is rotatable with respect to the valve main body 6.

As illustrated in FIG. 2 , a supporting recessed portion 51 having acolumnar shape for rotatably supporting an upper end portion of thevalve shaft 34 is formed in an upper end portion of the valve main body6. A cylindrical portion 51 b having a larger inner diameter is formedat an upper end of the supporting recessed portion 51 with a taperedportion 51 a being arranged therebetween. As described above, the uppershaft support part 36 and the sealing portion 38 of the valve shaft 34is supported at the supporting recessed portion 51 throughintermediation of the bearing 180 corresponding to one example of abearing member and the omniseals 160 and 170 so as to be rotatable andin a liquid-tight state.

More specifically, in the first embodiment of the present invention, asillustrated in FIG. 2 , the bearing 180 and the first and secondomniseals 160 and 170 are arranged in a gap defined between the uppershaft support part 36 and the sealing portion 38 of the valve shaft 34and the supporting recessed portion 51.

The first and second omniseals 160 and 170 have similar configurations.In this case, the first omniseal 160 is described as an example.

As illustrate in FIGS. 11 , the first omniseal 160 is an annular(ring-shaped) member that is arranged in a cylindrical gap definedbetween the upper shaft support part 36 and the sealing portion 38 ofthe valve shaft 34 and the supporting recessed portion 51 over theentire circumference. The omniseal 160 includes a spring member 161 anda sealing member 162. The spring member 161 has a substantially circularcross section or an elliptical cross section and is made of a metal suchas stainless steel. The sealing member 162 has a substantially U-shapedcross section and is made of a synthetic resin such aspolytetrafluoroethylene (PTFE), and is urged in the opening direction bythe spring member 161. The spring member 161 is made of a metal such asstainless steel formed in a helical shape and has a substantiallycircular cross section or an elliptical cross section. An elasticmodulus of the spring member 161 is adjusted by appropriately setting,for example, its width or thickness. As illustrated in FIG. 12 , thesealing member 162 has a proximal end portion 162 a and two lip portions162 b and 162 c. The proximal end portion 162 a is arranged in a sealingdirection so as to be located in the gap to be sealed between the uppershaft support part 36 and the sealing portion 38 of the valve shaft 34and the supporting recessed portion 51. The two lip portions 162 b and162 c extend from both ends of the proximal end portion 162 a in thesame direction (toward an outer side in the axial direction of the firstvalve seat element 70) along peripheral surfaces of the two members tobe sealed and are arranged in parallel so as to be opposed to eachother. An opening of the omniseal 160 is directed toward the inside ofthe valve seat 8 and is subjected to a pressure of the fluid in thevalve seat 8. Intermediate portions 162 b′ and 162 c′ of the lipportions 162 b and 162 c are formed in an arc-like curved shape so thateach of outer peripheral surfaces thereof from an intermediate portionto a distal end protrudes outward in the radial direction. Theintermediate portions 162 b′ and 162 c′ of the lip portions 162 b and162 c are in close contact with outer peripheral surfaces of the uppershaft support part 36 and the sealing portion 38 of the valve shaft 34and an inner peripheral surface of the supporting recessed portion 51 tothereby achieve a higher degree of hermetic sealing.

The spring member 161 of the omniseal 160 is not limited to the onehaving a substantially circular cross section or a substantiallyelliptical cross section. As illustrated in FIGS. 14 , the spring member161 may have a substantially U-shaped cross section. However, a largerrepulsive force is generated at a time of compression and deformationwhen the spring member 161 of the omniseal 160 has a substantiallycircular cross section or a substantially elliptical cross section,which results in a higher sealing effect. Thus, it is desirable that theomniseal 160 have a substantially circular cross section or asubstantially elliptical cross section.

When a pressure of a fluid is not applied or the pressure of the fluidis relatively low, the omniseal 160 hermetically seals the gap betweenthe upper shaft support part 36 and the sealing portion 38 of the valveshaft 34 and the supporting recessed portion 51 with use of an elasticrestoring force of the spring member 161. Meanwhile, when the pressureof the fluid is relatively high, the omniseal 160 hermetically seals thegap between the upper shaft support part 36 and the sealing portion 38of the valve shaft 34 and the supporting recessed portion 51 with use ofthe elastic restoring force of the spring member 121 and the pressure ofthe fluid. Thus, when the fluid flows into the gap between the uppershaft support part 36 and the sealing portion 38 of the valve shaft 34and the supporting recessed portion 51, the fluid does not leak to anoutside through the gap between the upper shaft support part 36 and thesealing portion 38 of the valve shaft 34 and the supporting recessedportion 51, which is sealed by the omniseal 160.

The omniseal 160 includes a combination of the spring member 161 made ofa metal and the sealing member 162 made of a synthetic resin. Not onlythe spring member 161 made of a metal but also polytetrafluoroethylene(PTFE), which is a synthetic resin for forming the sealing member 162,is excellent in heat resistance. Thus, the omniseal 160 is resistant tolong time use at a temperature within an ultralow temperature range.

In the first embodiment of the present invention, the omniseal forsealing the gap between the upper shaft support part 36 and the sealingportion 38 of the valve shaft 34 and the supporting recessed portion 51includes the first and second omniseals 160 and 170, which are arrangedin two layers so as to sandwich the bearing member therebetween. Thus,even when the first omniseal 160, which is located on a lower side, isworn away with elapse of time, sealing can be reliably achieved by thesecond omniseal 170, which is located on an upper side. Thus, the fluidcan be reliably prevented from leaking to the outside.

The bearing member 180 is made of a synthetic resin such as a polyimide(PI) resin and has an elliptical cross section or a rectangular crosssection. The bearing member made of a synthetic resin such as apolyimide (PI) resin can achieve an excellent sliding property even at alow temperature of about −60° C.

The location at which the bearing member 180 is arranged is not limitedto that between the first and second omniseals 160 and 170. The bearingmember 180 may be arranged on an outer side of the second omniseal 170in the axial direction.

In FIG. 2 , a reference symbol 181 denotes a thrust washer made of asynthetic resin such as polyimide (PI).

Further, in FIG. 2 and FIG. 3 , gaps between the first and second valveseat elements 70 and 80 and the first and second flow passage formingmembers 15 and 25 and gaps between the first and second flow passageforming members 15 and 25 and the valve main body 6 are sealed byomniseals 110 to 150. As each of the omniseals 110 to 150, an omnisealincluding a spring member having a substantially U-shaped cross sectionis used. Stepped portions 73 and 83 for receiving the omniseals areformed in the first and second valve seat elements 70 and 80. Thestepped portions 73 and 83 of the first and second valve seat elements70 and 80 are closed by the first pressure-receiving plate 76 and asecond pressure-receiving plate 86.

As illustrated in FIGS. 1 , the coupling portion 5 is arranged betweenthe valve main body 6, in which the sealing portion 4 is provided, andthe actuator portion 3. The coupling portion 5 is configured to connectthe valve shaft 34 and a rotation shaft (not shown), which allows thevalve shaft 34 to be integrally rotated, to each other.

As illustrated in FIGS. 1 , the coupling portion 5 includes a spacermember 59, an adaptor plate 60, and a coupling member 62. The spacermember 59 is arranged between the sealing portion 4 and the actuatorportion 3. The adaptor plate 60 is fixed to an upper portion of thespacer member 59. The coupling member 62 is accommodated in a space 61having a columnar shape formed in a state of penetrating an inside ofthe spacer member 59 and the adaptor plate 60, and connects the valveshaft 34 and the rotation shaft (not shown) to each other. The spacermember 59 is obtained by forming a synthetic resin such as a polyimide(PI) resin, into a parallelepiped shape, which has substantially thesame planar shape as that of the valve main body 6 and a relativelylarge height. The spacer member 59 is fixed to both the valve main body6 and the adaptor plate 60 through means such as screw fastening 59 b ofa flange portion 59 a provided to the lower end of the spacer member 59.Further, as illustrated in FIG. 1(c), the adaptor plate 60 is obtainedby forming metal, for example, SUS, into a plate-like shape having aplanar polygonal shape. The adaptor plate 60 is mounted to a base 64 ofthe actuator portion 3 in a fixed state with hexagon socket head capscrews 63.

As illustrated in FIG. 9(a), a recessed groove 65 is formed so as topenetrate an upper end of the valve shaft 34 in a horizontal direction.The valve shaft 34 is coupled and fixed to the coupling member 62 byfitting a projecting portion 66 of the coupling member 62 into therecessed groove 65. Meanwhile, a recessed groove 67 is formed in anupper end of the coupling member 62 so as to penetrate the couplingmember 62 in a horizontal direction. The rotation shaft (not shown) iscoupled and fixed to the coupling member 62 by fitting a projectingportion (not shown) into the recessed groove 67 of the coupling member62. An O-seal 190 for preventing a liquid from reaching the actuatorportion 3 when the liquid leaks from the sealing portion 4 is providedat an upper end portion of the spacer member 59.

As illustrated in FIGS. 1 , the actuator portion 3 includes the base 64having a rectangular shape in plan view. A casing 90 is mounted to anupper portion of the base 64 with screws 91. The casing 90 isconstructed as a box body having a rectangular parallelepiped shape,which contains drive means including a stepping motor, an encoder, andthe like. The drive means in the actuator portion 3 only needs to becapable of rotating the rotation shaft (not shown) in a desireddirection with predetermined accuracy based on control signals, andconfiguration thereof is not limited. The drive means includes astepping motor, a driving force transmission mechanism, and an anglesensor. The driving force transmission mechanism is configured totransmit a rotational driving force of the stepping motor to therotation shaft through intermediation of driving force transmissionmeans, for example, a gear. The angle sensor is, for example, an encoderor the like configured to detect a rotation angle of the rotation shaft.

In FIGS. 1 , a reference symbol 92 denotes a stepping motor-side cable,and a reference symbol 93 denotes an angle sensor-side cable. Thestepping motor-side cable 92 and the angle sensor-side cable 93 areconnected to a control device (not shown) configured to control thethree-way motor valve 1.

<Environmental Conditions>

As described above, the three-way motor valve 1 according to the firstembodiment of the present invention is configured so as to be usable fora fluid having a significantly low temperature of, for example, fromabout −85° C. to about 120° C., in particular, about −85° C. Thus, it isdesirable that ambient environmental conditions under which thethree-way motor valve 1 is to be used be set in accordance with atemperature range of from about −85° C. to about 120° C. Specifically,when a fluid having a temperature of about −85° C. is allowed to flowthrough the three-way motor valve 1, a temperature of the valve mainbody 4 itself becomes equal to about −85° C., which is the temperatureof the fluid. As a result, when conditions for an environment underwhich the three-way motor valve 1 is used include a humidity beingmoisture in air, it is considered that moisture in air, which adheres tothe three-way motor valve 1 and freezes, may cause malfunction of thethree-way motor valve 1.

Thus, in the first embodiment of the present invention, it is desirablethat an ambient humidity (relative humidity) be 0.10% or less,preferably about 0.01% under an environment replaced by a nitrogen (N²⁻)gas as environmental conditions under which the three-way motor valve 1is used.

<Operation of Three-way Motor Valve>

When a fluid having a low temperature of about −85° C. is allowed toflow through the three-way motor valve 1 according to the firstembodiment of the present invention, the flow rate of the fluid iscontrolled as follows.

As illustrated in FIG. 4 , at the time of assembly or adjustment foruse, in the three-way motor valve 1, the first flange member 10 and thesecond flange member 19 are once removed from the valve main body 6 sothat the adjusting rings 77 and 87 are exposed to the outside. Underthis state, when the fastening amounts of the adjusting rings 77 and 87with respect to the valve main body 6 are adjusted through use of thejig (not shown), as illustrated in FIG. 6 , the protruding amounts ofthe first valve seat element 70 and the second valve seat element 80from the valve seat 8 of the valve main body 6 are changed. When thefastening amounts of the adjusting rings 77 and 87 with respect to thevalve main body 6 are increased, the concave portions 74 of the firstvalve seat element 70 or the concave portion 84 of the second valve seatelement 80 protrudes from the inner peripheral surface of the valve seat8 of the valve main body 6 so that the gap G1 between the outerperipheral surface of the valve shaft 34 and the concave portion 74 ofthe first valve seat element 70 or the concave portion 84 of the secondvalve seat element 80 is reduced. Accordingly, the outer peripheralsurface of the valve shaft 34 is brought into contact with the concaveportion 74 of the first valve seat element 70 or the concave portion 84of the second valve seat element 80. Meanwhile, when the fasteningamounts of the adjusting rings 77 and 87 with respect to the valve mainbody 6 are reduced, a protruding length of the concave portion 74 of thefirst valve seat element 70 or the concave portion 84 of the secondvalve seat element 80 from the inner peripheral surface of the valveseat 8 of the valve main body 6 is reduced so that the gap G1 betweenthe outer peripheral surface of the valve shaft 34 and the concaveportion 74 of the first valve seat element 70 or the concave portion 84of the second valve seat element 80 is increased.

In the first embodiment of the present invention, for example, the gapG1 between the outer peripheral surface of the valve shaft 34 and theconcave portion 74 of the first valve seat element 70 or the concaveportion 84 of the second valve seat element 80 is set to be smaller than10 μm. However, the gap G1 between the outer peripheral surface of thevalve shaft 34 and the concave portion 74 of the first valve seatelement 70 or the concave portion 84 of the second valve seat element 80is not limited to the above-mentioned value. The gap G1 may be set to avalue smaller than the above-mentioned value, for example, may satisfythe gap G1=0 μm (contact state). Alternatively, the gap G1 may be set to10 μm or more.

As illustrated in FIGS. 1 , the fluid flows into the three-way motorvalve 1 from the third flange member 27 via a pipe (not shown), and thefluid flows out from the first flange member 10 and the second flangemember 19 via pipes (not shown). Further, as illustrated in FIG. 10(a),for example, in an initial state before start of operation, thethree-way motor valve 1 is brought into a state in which the valveoperating portion 45 of the valve shaft 34 simultaneously closes(completely closes) the first valve port 9 and opens (completely opens)the second valve port 18.

As illustrated in FIG. 2 , in the three-way motor valve 1, when thestepping motor (not shown) provided in the actuator portion 3 is drivento rotate by a predetermined amount, the rotation shaft (not shown) isdriven to rotate in accordance with a rotation amount of the steppingmotor. In the three-way motor valve 1, when the rotation shaft is drivento rotate, the valve shaft 34 coupled and fixed to the rotation shaft isrotated by an angle equivalent to the rotation amount (rotation angle)of the rotation shaft. The valve operating portion 45 is rotated in thevalve seat 8 along with the rotation of the valve shaft 34. With this,as illustrated in FIG. 14(a), the one end portion of the valve operatingportion 45 in the circumferential direction gradually opens the firstvalve port 9. As a result, the fluid flowing in from the inflow port 26flows into the valve seat 8 and flows out from a first housing member 10through the first outflow port 7.

At this time, as illustrated in FIG. 14(a), another end portion 45 b ofthe valve operating portion 45 in the circumferential direction opensthe second valve port 18. Thus, the fluid having flowed into the valveseat 8 through the inflow port 27 is divided in accordance with arotation amount of the valve shaft 34, and flows out from a secondhousing member 19 through the second outflow port 17.

As illustrated in FIG. 14(a), in the three-way motor valve 1, when thevalve shaft 34 is driven to rotate, and one end portion 45 a of thevalve operating portion 45 in the circumferential direction graduallyopens the first valve port 9, the fluid flows through the valve seat 8and the valve shaft 34, and is supplied to the outside through the firstvalve port 9 and the second valve port 18 and through the first outflowport 9 and the second outflow port 18.

Further, in the three-way motor valve 1, each of the both end portions45 a and 45 b of the valve operating portion 45 in the circumferentialdirection has a cross section having a curved-surface shape or a planarshape. Thus, the opening areas of the first and second valve ports 9 and18 can be linearly changed with respect to the rotation angle of thevalve shaft 34. Further, it is conceivable that the fluid regulated inflow rate by the both end portions 45 a and 45 b of the valve operatingportion 45 flow in a form of a nearly laminar flow. Therefore, thedistribution ratio (flow rate) between the fluid can be controlled withhigh accuracy in accordance with the opening areas of the first valveport 9 and the second valve port 18.

In the three-way motor valve 1 according to the first embodiment of thepresent invention, as described above, under an initial state, the valveoperating portion 45 of the valve shaft 34 simultaneously closes(completely closes) the first valve port 9 and opens (completely opens)the second valve port 18.

At this time, in the three-way motor valve 1, when the valve operatingportion 45 of the valve shaft 34 closes (completely closes) the firstvalve port 9, ideally, the flow rate of the fluid should be zero.

However, as illustrated in FIG. 6 , in the three-way motor valve 1, inorder to prevent metal-to-metal biting of the valve shaft 34 into theinner peripheral surface of the valve seat 8, the valve shaft 34 isprovided in a freely rotatable manner so as to be held in non-contactwith the valve seat 8 with a slight gap between the outer peripheralsurface of the valve shaft 34 and the inner peripheral surface of thevalve seat 8. As a result, the slight gap G2 is defined between theouter peripheral surface of the valve shaft 34 and the inner peripheralsurface of the valve seat 8. Accordingly, in the three-way motor valve1, even when the valve operating portion of the valve shaft 34 closes(completely closes) the first valve port 9, the flow rate of the fluiddoes not become zero, and a small amount of the fluid flows to thesecond valve port 18 side through the slight gap G2 defined between theouter peripheral surface of the valve shaft 34 and the inner peripheralsurface of the valve seat 8.

Incidentally, in the three-way motor valve 1 according to the firstembodiment of the present invention, as illustrated in FIG. 6 , thefirst valve seat element 70 and the second valve seat element 80 includethe concave portion 74 and the concave portion 84, respectively. Theconcave portion 74 or the concave portion 84 protrudes from the innerperipheral surface of the valve seat 8 toward the valve shaft 34 side,thereby partially reducing the gap G1 between the outer peripheralsurface of the valve shaft 34 and the inner peripheral surface of thevalve seat 8.

Therefore, in the three-way motor valve 1, in order to preventmetal-to-metal biting of the valve shaft 34 into the inner peripheralsurface of the valve seat 8, even when the valve shaft 34 is provided ina freely rotatable manner so as to be held in non-contact with the valveseat 8 with the slight gap between the outer peripheral surface of thevalve shaft 34 and the inner peripheral surface of the valve seat 8,inflow of the fluid through the first valve port 9 into the slight gapG2 defined between the outer peripheral surface of the valve shaft 34and the inner peripheral surface of the valve seat 8 is significantlyrestricted and suppressed by the gap G1 that is a region correspondingto a partially reduced gap between the outer peripheral surface of thevalve shaft 34 and the inner peripheral surface of the valve seat 8.

Accordingly, the three-way motor valve 1 can significantly suppressleakage of the fluid when the three-way motor valve 1 completely closesthe valve port as compared to a three-way motor valve that does notinclude the concave portions 74 and 84 formed to partially reduce thegap between the valve shaft 34 and the first valve seat element 70,which is opposed to the valve shaft 34, and the gap between the valveshaft 34 and the second valve seat element 80, which is opposed to thevalve shaft 34.

Preferably, the three-way motor valve 1 according to the firstembodiment of the present invention can significantly reduce the gaps G1and G2 through contact of the concave portion 74 of the first valve seatelement 70 and the concave portion 84 of the second valve seat element80 with the outer peripheral surface of the valve shaft 34, therebysignificantly suppressing leakage of the fluid when the three-way motorvalve 1 completely closes the valve port.

Further, similarly, the three-way motor valve 1 can significantlysuppress leakage and outflow of the fluid through the second valve port18 to another first valve port 9 side even when the valve operatingportion 45 of the valve shaft 34 closes (completely closes) the secondvalve port 18.

Moreover, as illustrated in FIG. 3 , in the first embodiment of thepresent invention, the first pressure applying portion 94 and the secondpressure applying portion 96 are respectively provided to the surface 70a of the first valve seat element 70 and the surface 80 a of the secondvalve seat element that are opposite to the valve shaft 34. The firstpressure applying portion 94 and the second pressure applying portion 96are configured to apply the pressure of the fluid through the slight gapbetween the outer peripheral surface of the valve shaft 34 and the innerperipheral surface of the valve seat 8. Accordingly, as illustrated inFIG. 10(a), in the three-way motor valve 1, under a state in which anopening degree is 0%, that is, the first valve port 9 is nearlycompletely closed, and under a state in which the opening degree is100%, that is, the first valve port 9 is nearly completely opened, whenthe first valve port 9 and the second valve port 18 are each broughtcloser to a completely closed state, an amount of outflow of the fluidthrough the first valve port 9 and the second valve port 18 issignificantly reduced. Along with this, in the three-way motor valve 1,in the valve port brought closer to a completely closed state, thepressure of the fluid flowing out through the first valve port 9 or thesecond valve port 18 is reduced. Thus, for example, when the openingdegree is 0%, that is, the first valve port 9 is completely closed, thefluid having a pressure of about 700 KPa flows in through the inflowport 26, and then flows out through the second valve port 18 whilemaintaining the pressure of about 700 KPa. At this time, on the side ofthe first valve port 9 that is nearly completely closed, a pressure onan outflow side is reduced to, for example, about 100 KPa. As a result,there is a difference in pressure of about 600 KPa between the secondvalve port 18 and the first valve port 9.

Therefore, in the three-way motor valve 1 against which nocountermeasures are taken, due to the difference in pressure between thesecond valve port 18 and the first valve port 9, the valve shaft 34 ismoved (displaced) to the side of the first valve port 9 under arelatively low pressure so that the valve shaft 34 is held in unbalancedcontact with the bearing 41. As a result, there is a fear in thatdriving torque is increased when the valve shaft 34 is driven to rotatein a direction of closing the valve shaft 34, thereby causing operationmalfunction.

In contrast, in the three-way motor valve 1 according to the firstembodiment of the present invention, as illustrated in FIG. 15 , thefirst pressure applying portion 94 and the second pressure applyingportion 96 are respectively provided to the surface of the first valveseat element 70 and the surface of the second valve seat element 80 thatare opposite to the valve shaft 34. The first pressure applying portion94 and the second pressure applying portion 96 are configured to apply,to the first valve seat element 70 and the second valve seat element thepressure of the fluid leaking through the slight gap between the outerperipheral surface of the valve shaft 34 and the inner peripheralsurface of the valve seat 8. Thus, in the three-way motor valve 1according to the first embodiment of the present invention, even whenthere is a difference in pressure between the second valve port 18 andthe first valve port 9, a relatively high pressure of the fluid isapplied to the first pressure applying portion 94 and the secondpressure applying portion 96 through the slight gap between the outerperipheral surface of the valve shaft 34 and the inner peripheralsurface of the valve seat 8. As a result, owing to the relatively highpressure of the fluid of about 100 KPa, which is applied to the firstpressure applying portion 94, the first valve seat element under arelatively low pressure of about 100 KPa is operated so as to restorethe valve shaft 34 to a proper position. Therefore, the three-way motorvalve 1 according to the first embodiment of the present invention canprevent and suppress the valve shaft 34 from being moved (displaced) tothe side of the first valve port 9 under a relatively low pressure dueto the difference in pressure between the second valve port 18 and thefirst valve port 9, can keep a state in which the valve shaft 34 issmoothly supported by the bearing 41, and can prevent and suppress anincrease in driving torque when the valve shaft 34 is driven to rotatein the direction of closing the valve shaft 34.

Further, the three-way motor valve 1 according to the first embodimentof the present invention similarly operates also under a state in whichthe first valve port 9 is nearly completely opened, that is, the secondvalve port 18 is nearly completely closed, and thus can prevent andsuppress the increase in driving torque when the valve shaft 34 isdriven to rotate.

In the three-way motor valve 1 according to the first embodiment of thepresent invention, as the fluid (brine), for example, a fluorine-basedinert liquid adaptable at a pressure of from 0 MPa to 1 MPa and within atemperature range of from about −85° C. to about 120° C., for example,Opteon (trademark) (manufactured by Chemours-Mitsui Fluoroproducts Co.,Ltd.) or Novec (trademark) (manufactured by 3M company) is used.

When the three-way motor valve 1 switches an outflow amount of the fluidhaving a temperature of about −85° C., a temperature of the valve mainbody 6 itself through which the fluid flows becomes equal to about −85°C.

The three-way motor valve 1 uses the first and second omniseals 160 and170 so as to hermetically seal (seal) the gap between the upper shaftsupport part 36 and the sealing portion 38 of the valve shaft 34 and thesupporting recessed portion 51. Further, the first and second omniseals160 and 170 are arranged so as to be open toward an inner side of thevalve seat 8. The first omniseal 160 includes a combination of thespring member 161 made of a metal and the sealing member 162 made of asynthetic resin. Not only the spring member 161 made of a metal but alsopolytetrafluoroethylene (PTFE), which is a synthetic resin for formingthe sealing member 162, is excellent in heat resistance. Thus, theomniseal 160 is resistant to long time use at a temperature within anultralow temperature range. This also applies to the other omniseal,that is, the second omniseal 170.

Thus, the three-way motor valve 1 according to the first embodiment ofthe present invention uses the first and second omniseals 160 and 170serving as the sealing means that has a substantially U-shaped crosssection and is made of a synthetic resin, and is urged in the openingdirection by the spring member made of a metal so as to hermeticallyseal (seal) the gap between the upper shaft support part 36 and thesealing portion 38 of the valve shaft 34 and the supporting recessedportion 51. Thus, sealing performance against a fluid having a lowtemperature of about −85° C. can be improved as compared to a case inwhich the gap between the upper shaft support part 36 and the sealingportion 38 of the valve shaft 34 and the supporting recessed portion 51is sealed by an O-ring.

Specifically, the gap between the upper shaft support part 36 and thesealing portion 38 of the valve shaft 34 and the supporting recessedportion 51 is sealed by using the first and second omniseals 160 and170. As a result, high sealing performance can be achieved even againsta fluid having a low temperature of about −85° C. Further, the first andsecond omniseals 160 and 170 have relatively large contact areas in thegap between the upper shaft support part 36 and the sealing portion 38of the valve shaft 34 and the supporting recessed portion 51. Also inthis regard, high sealing performance can be achieved.

Second Embodiment

FIG. 16 is a view for illustrating a three-way motor valve as oneexample of a flow rate control valve according to a second embodiment ofthe present invention.

The three-way motor valve 1 according to the second embodiment isstructured as the three-way motor valve 1 for mixing, which isconfigured to mix two kinds of different fluids instead of dividing thesame fluid into two parts.

As illustrated in FIG. 22 , the first inflow port 7 and the first valveport 9 are formed in one side surface of the valve main body 6 of thethree-way motor valve 1. The first inflow port 7 allows inflow of alower temperature fluid as a first fluid. The first valve port 9 has arectangular cross section, and communicates with the valve seat 8 havinga columnar space. In the second embodiment of the present invention,instead of directly forming the first outflow port 7 and the first valveport 9 in the valve main body 6, the first valve port 9 is formed in thefirst valve seat element 70 as one example of a valve port formingmember forming the first valve port 9, and the first inflow port 7 isformed in the first flow passage forming member 15 forming the firstinflow port 7. The first valve seat element 70 and the first flowpassage forming member 15 are fitted to the valve main body 6, therebyproviding the first inflow port 17 and the first valve port 9.

Further, the second inflow port 17 and the second valve port 18 areformed in another side surface of the valve main body 6 of the three-waymotor valve 1. The second inflow port 17 allows inflow of a highertemperature fluid as a second fluid. The second valve port 18 has arectangular cross section, and communicates with the valve seat 8 havinga columnar space. In the second embodiment of the present invention,instead of directly forming the second outflow port 17 and the secondvalve port 18 in the valve main body 6, the second valve port 18 isformed in the second valve seat element 80 as one example of a valveport forming member forming the second valve port 18, and the secondoutflow port 17 is formed in the second flow passage forming member 25forming the second outflow port 17. The second valve seat element 80 andthe second flow passage forming member 25 are fitted to the valve mainbody 6, thereby providing the second outflow port 17 and the secondvalve port 18.

Further, the outflow port 26 is opened in a bottom surface of the valvemain body 6 of the three-way motor valve 1. The outflow port 26 allowsoutflow of a fluid for temperature control, which is a mixture of fluidsobtained by mixing the first and second fluids inside the valve mainbody 6.

Here, the lower temperature fluid as the first fluid and the highertemperature fluid as the second fluid are fluids to be used fortemperature control. A fluid having a relatively lower temperature isreferred to as “lower temperature fluid,” and a fluid having arelatively higher temperature is referred to as “higher temperaturefluid.” Thus, the lower temperature fluid and the higher temperaturefluid represents a relative relationship The lower temperature fluid isnot a fluid having an absolutely low temperature, and the highertemperature fluid is not a fluid having an absolutely high temperature.As the lower temperature fluid and the higher temperature fluid, afluorine-based inert liquid, for example, Opteon (trademark)(manufactured by Chemours-Mitsui Fluoroproducts Co., Ltd.) or Novec(trademark) (manufactured by 3M company) is used at a pressure of from 0MPa to 1 MPa and within a temperature range of from about −85° C. toabout 120° C.

The other configurations and operations are the same as those of thefirst embodiment described above, and hence description thereof isomitted.

Third Embodiment

FIG. 17 is a view for illustrating a three-way motor valve as oneexample of a flow rate control valve according to a third embodiment ofthe present invention.

As illustrated in FIG. 17 , in a three-way motor valve 1 according tothe third embodiment of the present invention, a bearing member 180 isnot arranged between first and second omniseals 160 and 170 in a gapbetween an upper shaft support part 36 and a sealing portion 38 of avalve shaft 34 and a supporting recessed portion 51. Instead, thebearing member 180 is arranged above the first and second omniseals 160and 170 in the axial direction.

The three-way motor valve 1 according to the third embodiment of thepresent invention includes the first and second omniseals 160 and 170that are arranged in a serially connected state. Thus, a further highersealing effect can be achieved.

The other configurations and operations are the same as those of thefirst embodiment described above, and hence description thereof isomitted.

Example 1

FIG. 18 is a schematic diagram for illustrating a constant-temperaturemaintaining device (chiller device) to which the three-way motor valvefor flow rate control according to the first embodiment of the presentinvention is applied.

A chiller device 100 is, for example, used for a semiconductormanufacturing apparatus involving plasma etching, and configured tomaintain a temperature of a semiconductor wafer or the like as oneexample of a temperature control target W to a constant temperature. Thetemperature control target W, for example, a semiconductor wafer, mayrise in temperature along with generation or discharge of plasma or thelike after being subjected to plasma etching or the like.

The chiller device 100 includes a temperature control portion 101constructed to have a table-like shape as one example of the temperaturecontrol means arranged so as to be brought into contact with thetemperature control target W. The temperature control portion 101 has aflow passage 102 for temperature control therein. The fluid fortemperature control, which includes the lower temperature fluid and thehigher temperature fluid having been adjusted in mixture ratio, flowsthrough the flow passage 102 for temperature control.

Mixing means 111 is connected to the flow passage 102 for temperaturecontrol in the temperature control portion 101 through an open/closevalve 103. A constant-temperature reservoir 104 for lower temperature isconnected to one side of the mixing means 111. The constant-temperaturereservoir 104 for lower temperature stores the low temperature fluidadjusted to a predetermined lower temperature. The lower temperaturefluid is supplied to the three-way motor valve 1 from theconstant-temperature reservoir 104 for lower temperature by a first pump105. Further, a constant-temperature reservoir 106 for highertemperature is connected to another side of the mixing means 111. Theconstant-temperature reservoir 106 for higher temperature stores thehigh temperature fluid adjusted to a predetermined higher temperature.The higher temperature fluid is supplied to the three-way motor valve 1from the constant-temperature reservoir 106 for higher temperature by asecond pump 107. The mixing means 111 is connected to the flow passage102 for temperature control in the temperature control portion 101through the open/close valve 103.

Further, on an outflow side of the flow passage 102 for temperaturecontrol in the temperature control portion 101, a pipe for returning isprovided. The pipe for returning is connected to theconstant-temperature reservoir 104 for lower temperature and theconstant-temperature reservoir 106 for higher temperature through thethree-way valve 1 for flow rate control for division.

The chiller device 100 uses the three-way motor valve 1 in order todivide a fluid for control, which has flowed through the flow passage102 for temperature control in the temperature control portion 101,between the constant-temperature reservoir 104 for lower temperature andthe constant-temperature reservoir 106 for higher temperature. When thevalve shaft 34 is driven to rotate by a stepping motor 110, thethree-way motor valve 1 controls a flow rate of the fluid for control tobe divided between the constant-temperature reservoir 104 for lowertemperature and the constant-temperature reservoir 106 for highertemperature.

As the lower temperature fluid and the higher temperature fluid, afluorine-based inert liquid, for example, Opteon (trademark)(manufactured by Chemours-Mitsui Fluoroproducts Co., Ltd.) or Novec(trademark) (manufactured by 3M company) is used at a pressure of from 0MPa to 1 MPa and within a temperature range of from about −85° C. toabout 120° C.

In a mixing portion 111 in which the lower temperature fluid suppliedfrom the constant-temperature reservoir 104 for lower temperature by thefirst pump 105, and the higher temperature fluid supplied from theconstant-temperature reservoir 106 for higher temperature by the secondpump 107 are mixed together, there is used the mixing means for mixingthe lower temperature fluid and the higher temperature fluid asappropriate after controlling the flow rate of the lower temperaturefluid and the flow rate of the higher temperature fluid. As a matter ofcourse, as described above, the three-way motor valve 1 for mixing maybe used as the mixing means.

Example 2

FIG. 19 is a schematic diagram for illustrating a constant-temperaturemaintaining device (chiller device) to which the three-way motor valvefor flow rate control according to the second embodiment of the presentinvention is applied.

The three-way motor valve 1 is connected to the flow passage 102 fortemperature control in the temperature control portion 101 through anopen/close valve 103. A constant-temperature reservoir 104 for lowertemperature is connected to the first flange portion 10 of the three-waymotor valve 1. The constant-temperature reservoir 104 for lowertemperature stores the low temperature fluid adjusted to a predeterminedlower temperature. The lower temperature fluid is supplied to thethree-way motor valve 1 from the constant-temperature reservoir 104 forlower temperature by a first pump 105. Further, a constant-temperaturereservoir 106 for higher temperature is connected to the second flangeportion 19 of the three-way motor valve 1. The constant-temperaturereservoir 106 for higher temperature stores the high temperature fluidadjusted to a predetermined higher temperature. The higher temperaturefluid is supplied to the three-way motor valve 1 from theconstant-temperature reservoir 106 for higher temperature by a secondpump 107. The third flange member 27 of the three-way motor valve 1 isconnected to the flow passage 102 for temperature control in thetemperature control portion 101 through the open/close valve 103.

Further, on an outflow side of the flow passage 102 for temperaturecontrol in the temperature control portion 101, a pipe for returning isprovided. The pipe for returning is connected to theconstant-temperature reservoir 104 for lower temperature and theconstant-temperature reservoir 106 for higher temperature.

The three-way motor valve 1 includes a stepping motor 108 configured todrive the valve shaft 34 to rotate. Further, a temperature sensor 109configured to detect a temperature of the temperature control portion101 is provided to the temperature control portion 101. The temperaturesensor 109 is connected to a control device (not shown), and the controldevice is configured to control a drive of the stepping motor 108 of thethree-way motor valve 1.

As illustrated in FIG. 19 , in the chiller device 100, a temperature ofthe temperature control target W is detected by the temperature sensor109. Based on a detection result obtained by the temperature sensor 109,the rotation of the stepping motor 108 of the three-way motor valve 1 iscontrolled by the control device. Accordingly, the temperature controltarget W is controlled to a temperature equal to a predeterminedtemperature.

When the valve shaft 34 is driven to rotate by the stepping motor 108,the three-way motor valve 1 controls the mixture ratio between the lowertemperature fluid, which is supplied from the constant-temperaturereservoir 104 for lower temperature by the first pump 105, and thehigher temperature fluid, which is supplied from theconstant-temperature reservoir 106 for higher temperature by the secondpump 107, to control a temperature of the fluid for temperature control,which is a mixture of the lower temperature fluid and the highertemperature fluid to be supplied to the flow passage 102 for temperaturecontrol in the temperature control portion 101 from the three-way motorvalve 1 through the open/close valve 103.

At this moment, the three-way motor valve 1 is capable of controllingthe mixture ratio between the lower temperature fluid and the highertemperature fluid in accordance with the rotation angle of the valveshaft 34 with high accuracy, thereby being capable of finely adjusting atemperature of the fluid for temperature control. Thus, the chillerdevice 100 using the three-way motor valve 1 according to the embodimentof the present invention is capable of controlling a temperature of thetemperature control target W, which is brought into contact with thetemperature control portion 101, to a desired temperature, by allowingthe fluid for temperature control, which is controlled in mixture ratiobetween the lower temperature fluid and the higher temperature fluid andadjusted in temperature to a predetermined temperature, to flow throughthe flow passage 102 for temperature control in the temperature controlportion 101.

As the lower temperature fluid and the higher temperature fluid, afluorine-based inert liquid, for example, Opteon (trademark)(manufactured by Chemours-Mitsui Fluoroproducts Co., Ltd.) or Novec(trademark) (manufactured by 3M company) is used at a pressure of from 0MPa to 1 MPa and within a temperature range of from about −85° C. toabout 120° C.

INDUSTRIAL APPLICABILITY

The three-way valve for flow rate control and the temperature controldevice, each having improved sealing performance against the fluidhaving a low temperature of about −85° C., can be provided.

REFERENCE SIGNS LIST

-   -   1 . . . three-way motor valve    -   2 . . . valve portion    -   3 . . . actuator portion    -   4 . . . sealing portion    -   5 . . . coupling portion    -   6 . . . valve main body    -   7 . . . first inflow port    -   8 . . . valve seat    -   9 . . . first valve port    -   10 . . . first flange member    -   11 . . . hexagon socket head cap screw    -   12 . . . flange portion    -   13 . . . insertion portion    -   14 . . . pipe connecting portion    -   15 . . . first flow passage forming member    -   16 . . . chamfer    -   17 . . . second inflow port    -   18 . . . second valve port    -   19 . . . second flange member    -   20 . . . hexagon socket head cap screw    -   21 . . . flange portion    -   22 . . . insertion portion    -   23 . . . pipe connecting portion    -   25 . . . second flow passage forming member    -   34 . . . valve shaft    -   35 . . . valve body portion    -   45 . . . valve operating portion    -   45 b both end portions    -   80 . . . first and second valve seat element    -   74, 84 . . . concave portion    -   160, 170 . . . omniseal

1. A three-way valve for flow rate control, comprising: a valve mainbody including a valve seat having a columnar space and having a firstvalve port, a second valve port, and first and second valve ports, thefirst valve port having a rectangular cross section and allowing outflowof a fluid, the second valve port having a rectangular cross section andallowing outflow of the fluid, the first and second outflow ports beingconfigured to allow an outside and the first and second valve ports tocommunicate with each other, respectively; a valve body having acylindrical shape and having an opening, which is arranged in a freelyrotatable manner in the valve seat of the valve main body, andsimultaneously switches the first valve port from a closed state to anopened state and switches the second valve port from an opened state toa closed state; drive means for driving the valve body to rotate; andsealing means for sealing an end portion of the valve body on a sidecloser to the drive means so that the end portion is rotatable withrespect to the valve main body, the sealing means having a substantiallyU-shaped cross section and being made of a synthetic resin, and beingurged in an opening direction by a spring member made of a metal.
 2. Athree-way valve for flow rate control, comprising: a valve main bodyincluding a valve seat having a columnar space and having a first valveport, a second valve port, and first and second inflow ports, the firstvalve port having a rectangular cross section and allowing inflow of afirst fluid, the second valve port having a rectangular cross sectionand allowing inflow of a second fluid, the first and second inflow portsbeing configured to allow an outside and the first and second valveports to communicate with each other, respectively; a valve body havinga cylindrical shape and having an opening, which is arranged in a freelyrotatable manner in the valve seat of the valve main body, andsimultaneously switches the first valve port from a closed state to anopened state and switches the second valve port from an opened state toa closed state; drive means for driving the valve body to rotate; andsealing means for sealing an end portion of the valve body on a sidecloser to the drive means so that the end portion is rotatable withrespect to the valve main body, the sealing means having a substantiallyU-shaped cross section and being made of a synthetic resin, and beingurged in an opening direction by a spring member made of a metal.
 3. Thethree-way valve for flow rate control according to claim 1, wherein thesealing means comprises an omniseal.
 4. The three-way valve for flowrate control according to claim 3, wherein the sealing means comprises aplurality of sealing means arranged in an axial direction around the endportion of the valve body on the side closer to the drive means.
 5. Thethree-way valve for flow rate control according to claim 4, wherein abearing member configured to rotatably support the end portion of thevalve body on the side closer to the drive means is arranged between theplurality of sealing means.
 6. The three-way valve for flow rate controlaccording to claim 5, wherein the bearing member is arranged so as to bein close contact with the plurality of sealing means.
 7. A temperaturecontrol device, comprising: temperature control means having a flowpassage for temperature control, which allows a fluid for temperaturecontrol to flow therethrough, the fluid for temperature controlincluding a lower temperature fluid and a higher temperature fluidadjusted in mixture ratio; first supply means for supplying the lowertemperature fluid adjusted to a first predetermined lower temperature;second supply means for supplying the higher temperature fluid adjustedto a second predetermined higher temperature; mixing means, which isconnected to the first supply means and the second supply means, formixing the lower temperature fluid supplied from the first supply meansand the higher temperature fluid supplied from the second supply meansand supplying a mixture of the lower temperature fluid and the highertemperature fluid to the flow passage for temperature control; and aflow rate control valve configured to divide the fluid for temperaturecontrol having flowed through the flow passage for temperature controlbetween the first supply means and the second supply means whilecontrolling a flow rate of the fluid for temperature control, whereinthe three-way valve for flow rate control of claim 1 is used as the flowrate control valve.
 8. A temperature control device, comprising:temperature control means having a flow passage for temperature control,which allows a fluid for temperature control to flow therethrough, thefluid for temperature control including a lower temperature fluid and ahigher temperature fluid adjusted in mixture ratio; first supply meansfor supplying the lower temperature fluid adjusted to a firstpredetermined lower temperature; second supply means for supplying thehigher temperature fluid adjusted to a second predetermined highertemperature; a flow rate control valve, which is connected to the firstsupply means and the second supply means, for flowing, to the flowpassage for temperature control, the lower temperature fluid suppliedfrom the first supply means and the higher temperature fluid suppliedfrom the second supply means while adjusting the mixture ratio thereof,wherein the three-way valve for flow rate control of claim 2 is used asthe flow rate control valve.